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MarSurf CWM 100 3D Surface Measurement DESCRIPTION The multi-measurement solution MarSurf CWM 100 is a precise optical measuring instrument with sub-nanometer resolution combining a confocal microscope with a white light Interferometer. Key benefits: • Highest precision with subnanometer resolution • Universal suitability for technical, optical and reflective surfaces. Also for surfaces of printed circuit boards and semiconductor products as well as biological tissues • 2D surface analysis and measuring evaluations • Topographic 3D surface analysis and measuring evaluations • Intelligent measuring strategies - fast measurements – short measuring times • Microscope image field sizes, easily expandable by fully automatic stitching • Automatic table or object positioning: 100 mm x 100 mm, longer distances on request • A wide range of lenses allows for an ideal adaptation to the measurement object • Solid construction with granite base plate and granite column for the best possible vibration damping Supplied with: • Sensor system consists of: - Confocal microscope & WLI with 6x nosepiece - Camera, 780 x 580 pixels, up to 48 images/s (standard version) - 100 mm CNC controlled Z axis with integrated Heidenhain glass scale • One operating software with WLI and confocal software modules • Granite base frame and column with sensor system and CNC controlled object table • CNC controled motorized Z axis and XY table for probe positioning and image field merging • Lenses (optional) - 4x to 150x (confocal microscope) - 2.5x to 100x (white light Interferometer) TECHNICAL DATA CWM 100 Measuring principle By interferometer, by white light interferometer and confocal Light source (CM and WLI): LED, 505 nm Sensor unit can be moved 100 mm in Z, CNC controlled Object table can be moved 100 mm in X and Y, CNC controlled Measuring range Interferometer, white light interferometer: Measuring range (WLI): More as 4 mm (Standard mode), more as 20 mm in extended mode Confocal microscope: Measuring range (CM): more than 12 mm (depending on resolution in Z and lens) APPLICATIONS ACCESSORIES Mechanical Engineering • To qualify and quantify roughness, geometry and wear volume Optional: • CT 120 two-axes tilting table • Tilting table for large angles +/– 30° • Set of standards • WLI Objective lenses: 2.5x0.075; 5x0.13; 10x0.3; 20x0.4; 50x0.55; 100x0.7 • Confocal microscope objective lenses: 10x0.3; 10x0.5; 20x0.4; 20x0.75;50x0.6; 50x0.8; 100x0.9 • MarSurf MfM for professional evaluation, graphical representation and creation of measuring records (choice of Standard, Extended or Premium Version) • Active vibration isolation system (for optimum damping for measurements in the nanometer and subnanometer range Electronics and semiconductors • Component inspection down to the sub-micrometer range for defect-free products Medical Technology • Quality assurance of medical surfaces in production and laboratory Material Science • Optimization of functional properties of new surfaces and products Microsystems Technology • Measure complex surface geometries of smallest components with nanometer precision For more information, please visit our website: www.mahr.com MarSurf | Surface Measuring Instruments 553
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