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MarSurf WM 100 3D Surface Measurement DESCRIPTION High-precision white light interferometry.The MarSurf WM 100 with new camera and functionally enlarged Interferometer Software offers sub-nanometer resolution and precision. Key benefits: • Maximum precision with subnanometer resolution and measuring accuracy • Fast and simple measurements- reliable results • Suitable for all optical and reflective surfaces, fine technical surfaces and surfaces of circuit boards, semi-conductor products and biological tissue • Three different measuring modes: VSI, EPSI and PSI • Special evaluation mode for small steps • 2D surface analysis and measurement evaluations • Topographical 3D surface analysis and measurement evaluations • Manual table and object positioning in up to 4 axes • Wide choice of lenses for perfect adjustment to the measuring object • Sturdy design with granite base plate Supplied with: • Sensor system consisting of: - WLI sensor head - Camera, 1280 x 1024 pixels, up to 169 fps - 100 µm piezo drive z-measuring head • WLI software module, operating Software • PC with Windows 10 and 24” screen • Granite base and column with manual positioning of sensor system • Manual XY object table for object positioning • 20x0.4 DI lens (white light Interferometer) TECHNICAL DATA WM 100 Measuring principle By interferometer, by white light interferometer Light source (WLI): LED, 505 nm Sensor unit can be moved manually over 200 mm in Z Object table can be moved manually in X and Y Measuring range Interferometer, white light interferometer: Measuring range (WLI): Up to 100 µm (vertical). More on request. APPLICATIONS ACCESSORIES Mechanical Engineering • To qualify and quantify roughness of metal surfaces (ground, rolled, etc.) Optional: • CT 120 two-axis tilting table • Tilting table for large angles +/– 30° • Set of standards • WLI Objective lenses: 2.5x0.075; 5x0.13; 10x0.3; 20x0.4; 50x0.55; 100x0.7 • MarSurf MfM for professional evaluation, graphical representation and creation of measuring records (choice of Standard, Extended or Premium Version) • Active vibration isolation system (for optimum damping for measurements in the nanometer and sub-nanometer range) Electronics and semiconductors • Surface analysis of coatings, measurement and analysis of electronic and semi-conductor components Medical Technology • Metal, ceramic and plastic surfaces of implants, prostheses and Instruments Optics • Roughness analysis of optical components (all materials) For more information, please visit our website: www.mahr.com 552 MarSurf | Surface Measuring Instruments
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